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Dry Vacuum Pump(ULVAC) - List of Manufacturers, Suppliers, Companies and Products

Dry Vacuum Pump Product List

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Dry Vacuum Pump CR Series

Dry Vacuum Pump CR Series

The exhaust chamber can achieve stable exhaust over a long period without using oil and without contact. 【ULVAC】

The CR series dry vacuum pumps are air-cooled, roots-type dry vacuum pumps. They do not use oil in the exhaust chamber, and the rotor and cylinder operate without contact, allowing for stable operation over long periods. No cooling water or nitrogen gas is required, contributing to reduced running costs. 【Product Lineup】 ○ CR16A ○ CR30A ○ CR60A ○ CR300A For more details, please contact us or download the catalog.

  • Vacuum pump

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Dry Vacuum Pump GR Series

Dry Vacuum Pump GR Series

This is a pump with a simple structure designed for general industrial use. 【ULVAC】

The GR Series dry vacuum pumps are designed with a simple structure for general industry, based on the proven and reliable LR and HR series. They can be used for high-load applications such as repeated exhaust from atmospheric pressure to vacuum and continuous operation in high-pressure areas. They are ideal for exhausting load lock chambers that require high throughput. 【Product Lineup】 ○ GR60A ○ GR90A ○ GR180A For more details, please contact us or download the catalog.

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Dry Vacuum Pump LR/HR/UR Series

Dry Vacuum Pump LR/HR/UR Series

Achieved high durability in hard processes such as CVD and dry etching. [ULVAC]

The LR/HR/UR series has achieved high durability in hard processes such as CVD and dry etching through the effective utilization of compression heat, thanks to its unique high-temperature uniform heating technology. In light processes, it is possible to reduce power consumption by up to approximately 70% in combination with ECO-SHOCK. Additionally, it improves maintainability and reduces noise, and all models are CE compliant (optional). 【Product Lineup】 ○ LR/HR60 ○ LR/HR90 ○ LR180 ○ LR421 ○ LR421-T, etc. For more details, please contact us or download the catalog.

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Dry Vacuum Pump ECO-SHOCK

Dry Vacuum Pump ECO-SHOCK

This is a groundbreaking attachment that significantly reduces power consumption. 【ULVAC】

ECO-SHOCK is a revolutionary attachment that can significantly reduce the power consumption of your currently used dry pump by installing it on the dry pump. It is ideal for dry pumps used in inert gas exhaust applications. 【Features】 - Can reduce the power consumption of dry vacuum pumps by up to 80% - No decrease in exhaust speed across all pressure ranges - Easy to install For more details, please contact us or download the catalog.

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